機器(委託対応)の詳細情報

Detailed Information of Equipment(Job Request)

Equipment and Job Request Information
Affiliation Faculty of Pure and Applied Sciences
Category Limited Purpose Equipment
Equipment (Job Request) Stylus Profilemeter Alpha-Step D-500
Supplier (Equipment type) Ulvac (Alpha-Step D-500)

Specification・Features

Stylus Type Step Profiler
Scan lengths; 30 mm
Diameter of sample stage; 140 mm
Maximum sample thickness: 20 mm
Highest vertical range; 1200 μm
Vertical measurement resolution; 0.038 nm (2.5 μm Range)
Observation magnification; ×1, ×1.3, ×2, ×4
Installation site Cooperative Research Building C 301
Remark
Research Accomplishment
Inquiry 利用相談はこちらより必要事項をご記入の上、お問い合わせください。
機器担当者 担当者:微細加工PFスタッフ
University-wide
Shared Use Rate
210 Yen / 30 min.
Picture