機器(委託対応)の詳細情報

Detailed Information of Equipment(Job Request)

Equipment and Job Request Information
Affiliation Faculty of Pure and Applied Sciences
Category LSI Process Equipment
Equipment (Job Request) [Job Request] Forcused Ion beam - Scanning Electron Microscope Helios Nanolab 600i
Supplier (Equipment type) FEI (Helios Nanolab 600i)

Specification・Features

TEM sample fabrication using two kinds of ion sources. Continuous SEM observation during TEM sample fabrication by the ion irradiation in the same chamber.
Acceleration voltage; 50-30 kV (electron beam), 500-30 kV (Ga ion beam)
Gas for deposition; C, Pt
Installation site Cooperative Research Building C 107
Remark
Research Accomplishment
Inquiry 利用相談はこちらより必要事項をご記入の上、お問い合わせください。
機器担当者 担当者:微細加工PFスタッフ
University-wide
Job Request Rate
24,600 Yen / hr.
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