機器(委託対応)の詳細情報

Detailed Information of Equipment(Job Request)

Equipment and Job Request Information
Affiliation Faculty of Pure and Applied Sciences (ARIM)
Category Limited Purpose Equipment
Equipment (Job Request) (ARIM)Ion Milling System
Supplier (Equipment type) HITACHI Hitachi High-Technologies(IM4000PLUS)

Specification・Features

The IM4000Plus Series Ion-Milling Systems are the second-generation of IM4000 series hybrid instruments that support Cross-Section Milling and Flatmilling. A wide variety of system configurations are available: Standard, Cooling, Air Protection, and Cooling & Air Protection.

Primary specification
<Flat milling folder>
Gas:Argon gas
Accelerating voltage:0~6kV
Maximum milling rate(Material:Si):500μm/hr以上
Maximum sample size:20(W)×12(D)×7(H)mm
Sample stage traverse:X ±7mm 、 Y 0~+3mm

<Flatmilling folder>
Gas:Argon gas
Accelerating voltage:0~6kV
Maximum sample size:Φ50 × 25(H) mm
Sample stage traverse:X 0~+5mm
Installation site Project and Research Building
Remark
Research Accomplishment
Inquiry 利用相談はこちらより必要事項をご記入の上、お問い合わせください。
機器担当者 担当者:関口
所属:数理物質系 マテリアル先端リサーチインフラ事業(ARIM)
University-wide
Shared Use Rate
1,310 Yen / 30 min.
University-wide
Job Request Rate
6,200 Yen / hr.
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