機器(委託対応)の詳細情報

Detailed Information of Equipment(Job Request)

Equipment and Job Request Information
Affiliation Institute of Pure and Applied Sciences (ARIM)
Category LSI Process Equipment
Equipment (Job Request) (ARIM)Reactive Etching System RIE-10NR
Supplier (Equipment type) Samco (RIE-10NR)

Specification・Features

The Reactive Ion Etching apparatus which performs the high precision for various silicon films.
・ Corresponding to wafers of 8 inches in diameter
・ The high frequency output; 300 W
・ Oscillation frequency; 13.56 MHz
・ Gas; CF4, CHF3, O2
Installation site Cooperative Research Building C 309
Remark
Research Accomplishment
Inquiry 利用相談はこちらより必要事項をご記入の上、お問い合わせください。
機器担当者 担当者:ARIMスタッフ
所属:数理物質系 マテリアル先端リサーチインフラ事業(ARIM)
University-wide
Shared Use Rate
単価 A: 930 円 / 30分
University-wide
Job Request Rate
7,400 Yen / hr.
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