機器(委託対応)の詳細情報

Detailed Information of Equipment(Job Request)

Equipment and Job Request Information
Affiliation Institute of Pure and Applied Sciences (ARIM)
Category LSI Process Equipment
Equipment (Job Request) (ARIM)Electron Beam Evaporator EB-540T
Supplier (Equipment type) Eiko Engineering (EB-540T)

Specification・Features

Vacuum thin-film deposition system equiped with one electron-beam gun and five deposition source crucibles.
Substrates are transfered to the deposition chamber via load-lock chamber, and can be inclined at up to 90 degree for angled deposition.
Base pressure: < 1x10-6 Pa
Substrate size: max. 5 inches in diameter
Installation site Cooperative Research Building C 309
Remark
Research Accomplishment
Inquiry 利用相談はこちらより必要事項をご記入の上、お問い合わせください。
機器担当者 担当者:ARIMスタッフ
所属:数理物質系 マテリアル先端リサーチインフラ事業(ARIM)
University-wide
Shared Use Rate
単価 A: 1,540 円 / 30分
University-wide
Job Request Rate
8,800 Yen / hr.
Picture