機器(委託対応)の詳細情報

Detailed Information of Equipment(Job Request)

Equipment and Job Request Information
Affiliation Institute of Pure and Applied Sciences (ARIM)
Category Limited Purpose Equipment
Equipment (Job Request) (ARIM)Stylus Profilemeter Alpha-Step D-500
Supplier (Equipment type) KLA-TENCOR (Alpha-Step D-500)

Specification・Features

Stylus Type Step Profiler
Scan lengths; 30 mm
Diameter of sample stage; 140 mm
Maximum sample thickness: 20 mm
Highest vertical range; 1200 μm
Vertical measurement resolution; 0.038 nm (2.5 μm Range)
Observation magnification; ×1, ×1.3, ×2, ×4
Installation site Cooperative Research Building C 301
Remark
Research Accomplishment
Inquiry 利用相談はこちらより必要事項をご記入の上、お問い合わせください。
機器担当者 担当者:ARIMスタッフ
所属:数理物質系 マテリアル先端リサーチインフラ事業(ARIM)
University-wide
Shared Use Rate
単価 A: 210 円 / 30分
University-wide
Job Request Rate
6,000 Yen / hr.
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