機器(委託対応)の詳細情報

Detailed Information of Equipment(Job Request)

Equipment and Job Request Information
Affiliation Faculty of Pure and Applied Sciences (ARIM)
Category LSI Process Equipment
Equipment (Job Request) (ARIM)Sputtering System CFS-4EP-LL
Supplier (Equipment type) Shibaura Mechatronics (CFS-4EP-LL)

Specification・Features

The automatic film formation device of the side sputtering method with the road lock.
Board table: φ 220 mm
Heating temperature: Room temperature - 300 degrees Celsius
Target: φ 3 inches
GUN x four, prepared materials are Au, Ag, Cr, Al, Ti, Pt, SiO2
(One of GUNs is for ferromagnetic materials)
Reverse sputtering is available
Use gas: Ar, O2, N2
Installation site Cooperative Research Building C 309
Remark
Research Accomplishment
Inquiry 利用相談はこちらより必要事項をご記入の上、お問い合わせください。
機器担当者 担当者:ARIMスタッフ
所属:数理物質系 マテリアル先端リサーチインフラ事業(ARIM)
University-wide
Shared Use Rate
1,200 Yen / 30 min.
University-wide
Job Request Rate
6,000 Yen / hr.
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