機器(委託対応)の詳細情報

Detailed Information of Equipment(Job Request)

Equipment and Job Request Information
Affiliation Faculty of Pure and Applied Sciences (ARIM)
Category LSI Process Equipment
Equipment (Job Request) (ARIM)Inkjet Printer
Supplier (Equipment type) SI Technology (ST050)

Specification・Features

The uPG501 is an optical direct-writing lithography system by using 390nm light and a micro-mirror array (DMD).
・LED Illumination Module (390nm)
・Maximum substrate size: 5 inch
・Conversion software for DXF, GDSII, Gerber files and CIF

Installation Date: Feb.19, 2014
Installation site Cooperative Research Building C 107
Remark
Research Accomplishment
Inquiry 利用相談はこちらより必要事項をご記入の上、お問い合わせください。
機器担当者 担当者:ARIMスタッフ
所属:数理物質系 マテリアル先端リサーチインフラ事業(ARIM)
University-wide
Shared Use Rate
1,450 Yen / 30 min.
University-wide
Job Request Rate
6,400 Yen / hr.
Picture