機器(委託対応)の詳細情報

Detailed Information of Equipment(Job Request)

Equipment and Job Request Information
Affiliation Faculty of Pure and Applied Sciences
Category Limited Purpose Equipment
Equipment (Job Request) Thermal Emission Microscope THEMOS-1000(Power Electronics)
Supplier (Equipment type) Toki Commercial Co., Ltd. THEMOS-1000 

Specification・Features

[Features of the apparatus]
・ The THEMOS (thermal emission microscope) is semiconductor failure analysis system that pinpoints failures by detecting thermal emissions generated within the semiconductor device. By observing the infrared image, it is possible to detect the heat generation distribution (temperature distribution) and to identify the current leak location.

・ The InSbHR camera is installed and it is possible to obtain a clear pattern image over details with high resolution and high contrast even when the backside observation.

・ By measuring the time dependence of the heat generation distribution, the temporal spread of temperature can be observed.

[specification]
・ Detection sensitivity : 3.7μm - 5.1, Maximum field of view : 3cm x 2cm, Minimum field of view : 0.7mm x 0.7mm, Spatial resolution : 2.8μm, Noise equivalent temperature difference (NETD) : 25mK, Time resolution : 3μsec.

Date of acquisition : 26th Mach 2014
Installation site Laboratory of Advanced Research B0022
Remark
Research Accomplishment
Inquiry 利用相談はこちらより必要事項をご記入の上、お問い合わせください。
機器担当者 担当者:磯部
所属:数理物質系
University-wide
Shared Use Rate
2,500 Yen / 30 min.
University-wide
Job Request Rate
13,330 Yen / hr.
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