機器(委託対応)の詳細情報

Detailed Information of Equipment(Job Request)

Equipment and Job Request Information
Affiliation Faculty of Pure and Applied Sciences
Category LSI Process Equipment
Equipment (Job Request) Maskless Lithography System
Supplier (Equipment type) Heidelberg Instruments (μPG501)

Specification・Features

The uPG501 is an optical direct-writing lithography system by using 390nm light and a micro-mirror array (DMD).

・LED Illumination Module (390nm)
・Maximum substrate size: 5 inch
・Conversion software for DXF, GDSII, Gerber files and CIF

Installation date March 14, 2014
Installation site Cooperative Research Building C 107
Remark
Research Accomplishment
Inquiry 利用相談はこちらより必要事項をご記入の上、お問い合わせください。
機器担当者 担当者:微細加工PFスタッフ
University-wide
Shared Use Rate
480 Yen / 30 min.
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