{"id":3186,"date":"2019-07-17T15:51:12","date_gmt":"2019-07-17T06:51:12","guid":{"rendered":"http:\/\/openfacility.sec.tsukuba.ac.jp\/public\/?p=3186"},"modified":"2019-08-08T17:28:12","modified_gmt":"2019-08-08T08:28:12","slug":"new_20190806","status":"publish","type":"post","link":"https:\/\/openfacility.sec.tsukuba.ac.jp\/public\/new_20190806\/","title":{"rendered":"(\u7d42\u4e86)\u6570\u7406\u7269\u8cea\u7cfb \u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0 \u30aa\u30da\u30ec\u30fc\u30b7\u30e7\u30f3\u30c8\u30ec\u30fc\u30cb\u30f3\u30b0\u306e\u304a\u77e5\u3089\u305b(8\/6)"},"content":{"rendered":"

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\n——————————————————————————————-
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\n\u3000 \u30d7\u30e9\u30ba\u30de\u30c0\u30e1\u30fc\u30b8\u304c\u5165\u308a\u307e\u305b\u3093\u3002
\n\u30fb Si\u306e\u8868\u9762\u3084\u6e9d\u306e\u5e73\u6ed1\u5316\u30fb\u30c9\u30e9\u30a4\u6d17\u6d44\u3001SiO2\u4e0a\u306eSiN\u819c\u306e\u9ad8\u9078\u629e\u6bd4\u30a8\u30c3\u30c1\u30f3\u30b0\u3001DRIE\u5f8c\u306e
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\n\u3010\u4ed5\u69d8\u3011
\n\u30fb \u30d7\u30e9\u30ba\u30de\u96fb\u6e90\uff1a\u30de\u30a4\u30af\u30ed\u6ce2 2.45GHz 1kW\u3001
\n\u30fb \u30a8\u30c3\u30c1\u30f3\u30b0\u30ac\u30b9\uff1aCF4, O2, N2, Ar(\u6e96\u5099\u4e2d)
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\n\uff08\u5f53\u65e5\u306e\u6d41\u308c\uff09
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\n\u30fb\u30b5\u30f3\u30d7\u30eb\u30bb\u30c3\u30c8\u53ca\u3073\u30a8\u30c3\u30c1\u30f3\u30b0\u64cd\u4f5c
\n\u30fb\u7d42\u4e86\u624b\u9806<\/p>\n

\u3010\u958b\u50ac\u65e5\u3011\u3000
\n2019\u5e748\u67086\u65e5\uff08\u706b\uff0913:30\uff5e<\/p>\n

\u3010\u4f1a\u5834\u3011
\n\u7dcf\u5408\u7814\u7a76\u68dfB 0022\u5ba4<\/p>\n

\u3010\u5fdc\u52df\u4eba\u6570\u3011
\n10\u540d\u7a0b\u5ea6
\n\u3010\u7533\u8fbc\u5148\u30fb\u554f\u3044\u5408\u305b\u3011
\nsharing-power-e(at)ml.cc.tsukuba.ac.jp\u2003\u203b(at)\u3092@\u306b\u5909\u63db\u3057\u3066\u9001\u4fe1\u3057\u3066\u304f\u3060\u3055\u3044 \u2003
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\u3010\u5fdc\u52df\u7de0\u5207\u3011
\n2018\u5e748\u2f491\u2f47(\u6728)<\/p>\n

– Information in English –<\/p>\n

To Open Facility System Users<\/p>\n

Thank you very much for using the open facility system daily.<\/p>\n

Now, we will carry out operation training of (Chemical) Dry etching equipment (CDE-7-4). It will be announced in the following.<\/p>\n

Equipment: Dry Etching Equipment<\/a>
\nFor details, please click here<\/a>.<\/p>\n

\u3010Lecture content\u3011
\n(Sorry, it should be noted, all presentation will be Japanese.)<\/p>\n

This time, it will be a short course that briefly explains the operation procedure and the handling points. Please come by all means if you plan to use this equipment.
\n\u30fb Start-up procedure of the CDE equipment
\n\u30fb How to operate the etching process
\n\u30fb Ending operation of the CDE
\n\u203b Please note that the content may change depending on the situation.
\nThank you for your cooperation and understanding<\/p>\n

\u3010Dates\u3011
\nAugust 6, 2019\uff08Tue.\uff0913:30-<\/p>\n

\u3010Training place\u3011
\nLABORATORY FOR ADVANCED RESEARCH B 0022 ROOM<\/p>\n

\u3010Capacity\u3011
\nAbout 10 persons<\/p>\n

\u3010Inquiry and Application\u3011
\nsharing-power-e(at)ml.cc.tsukuba.ac.jp\u2003\u203b(Please change (at) to @.)
\nThe subject as \u201cApplication for On-site training of CDE-7-4\u201d, please contact us your name, E-mail address, Faculty, laboratory name by E-mail. <\/p>\n

\u3010Application deadline\u3011
\nAugust 1, 2019 (Thu.)<\/p>\n","protected":false},"excerpt":{"rendered":"

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