{"id":2664,"date":"2018-07-25T17:25:37","date_gmt":"2018-07-25T08:25:37","guid":{"rendered":"http:\/\/openfacility.sec.tsukuba.ac.jp\/public\/?p=2664"},"modified":"2018-10-23T11:14:14","modified_gmt":"2018-10-23T02:14:14","slug":"news_workshop_20180801","status":"publish","type":"post","link":"https:\/\/openfacility.sec.tsukuba.ac.jp\/public\/news_workshop_20180801\/","title":{"rendered":"(\u7d42\u4e86)\u6570\u7406\u7269\u8cea\u7cfb \u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0\u30aa\u30da\u30ec\u30fc\u30b7\u30e7\u30f3\u30c8\u30ec\u30fc\u30cb\u30f3\u30b0\u958b\u50ac\u306e\u304a\u77e5\u3089\u305b(8\/6)"},"content":{"rendered":"

\u4e0b\u8a18\u306e\u30c8\u30ec\u30fc\u30cb\u30f3\u30b0\u306f\u7d42\u4e86\u3044\u305f\u3057\u307e\u3057\u305f\u3002
\n——————————————————————————————
\n\u65e5\u9803\u3088\u308a\u3001\u30aa\u30fc\u30d7\u30f3\u30d5\u30a1\u30b7\u30ea\u30c6\u30a3\u30fc\u306e\u767b\u9332\u6a5f\u5668\u3092\u3054\u5229\u7528\u3044\u305f\u3060\u304d\u307e\u3057\u3066\u8aa0\u306b\u3042\u308a\u304c\u3068\u3046\u3054\u3056\u3044\u307e\u3059\u3002<\/p>\n

\u3053\u306e\u5ea6\u3001\u6570\u7406\u7269\u8cea\u7cfb(\u30d1\u30ef\u30a8\u30ec\u5171\u7528\u30b7\u30b9\u30c6\u30e0)\u3067\u4fdd\u6709\u3057\u3066\u304a\u308a\u307e\u3059\u3001\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0\u306e
\n\u30aa\u30da\u30ec\u30fc\u30b7\u30e7\u30f3\u30c8\u30ec\u30fc\u30cb\u30f3\u30b0\u3092\u5b9f\u65bd\u3059\u308b\u3053\u3068\u3068\u306a\u308a\u307e\u3057\u305f\u306e\u3067\u3001\u4ee5\u4e0b\u306b\u304a\u77e5\u3089\u305b\u7533\u3057\u4e0a\u3052\u307e\u3059\u3002<\/p>\n

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\n\u8a73\u7d30\u306f\u3001\u3053\u3061\u3089<\/a>\u3088\u308a\u3054\u89a7\u304f\u3060\u3055\u3044\u3002<\/p>\n

\u3010\u88c5\u7f6e\u7279\u5fb4\u3011
\n\u30fb \u30e9\u30b8\u30ab\u30eb\u306b\u3088\u308b\u4f4e\u30c0\u30e1\u30fc\u30b8\u306e\u7b49\u65b9\u6027\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\u88c5\u7f6e\u3067\u3059\u3002\u30de\u30a4\u30af\u30ed\u6ce2\u30d7\u30e9\u30ba\u30de\u3067\u751f\u6210\u3055\u308c\u305f\u30e9\u30b8\u30ab\u30eb
\n\u3000 \u306b\u3088\u308a\u3001Si\u3084SiO2\u306a\u3069\u69d8\u3005\u306a\u6750\u6599\u306e\u30a8\u30c3\u30c1\u30f3\u30b0\u304c\u53ef\u80fd\u3067\u3059\u3002
\n\u30fb \u51e6\u7406\uff08\u30a8\u30c3\u30c1\u30f3\u30b0\uff09\u90e8\u3068\u30d7\u30e9\u30ba\u30de\u767a\u751f\u90e8\u304c\u5b8c\u5168\u306b\u5206\u96e2\u3057\u305f\u3001 \u30ea\u30e2\u30fc\u30c8\u30d7\u30e9\u30ba\u30de\u65b9\u5f0f\u3067\u3042\u308b\u305f\u3081\u3001
\n\u3000 \u30d7\u30e9\u30ba\u30de\u30c0\u30e1\u30fc\u30b8\u304c\u5165\u308a\u307e\u305b\u3093\u3002
\n\u30fb Si\u306e\u8868\u9762\u3084\u6e9d\u306e\u5e73\u6ed1\u5316\u30fb\u30c9\u30e9\u30a4\u6d17\u6d44\u3001SiO2\u4e0a\u306eSiN\u819c\u306e\u9ad8\u9078\u629e\u6bd4\u30a8\u30c3\u30c1\u30f3\u30b0\u3001DRIE\u5f8c\u306e\u30b9\u30ad\u30e3\u30ed\u30c3\u30d7\u9664\u53bb
\n\u3000 \u306a\u3069\u304c\u53ef\u80fd\u3067\u3059\u3002
\n\u3010\u4ed5\u69d8\u3011
\n\u30fb \u30d7\u30e9\u30ba\u30de\u96fb\u6e90\uff1a\u30de\u30a4\u30af\u30ed\u6ce2 2.45GHz 1kW\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u30ac\u30b9\uff1aCF4, O2, N2.
\n\u30fb \u8a66\u6599\u30b5\u30a4\u30ba\uff1a\u6570mm\uff5e6\u30a4\u30f3\u30c1\u30a6\u30a7\u30cf\u30fc\uff08\u6700\u592725\u679a\uff09<\/p>\n

\u3010\u8b1b\u7fd2\u5185\u5bb9\u3011
\n\u829d\u6d66\u30e1\u30ab\u30c8\u30ed\u30cb\u30af\u30b9\u3001\u829d\u6d66\u30a8\u30ec\u30c6\u30c3\u30af\u306e\u30e1\u30fc\u30ab\u30fc\u6280\u8853\u8005\u3092\u304a\u62db\u304d\u3057\u3066\u306e\u64cd\u4f5c\u8b1b\u7fd2\u4f1a\u3068\u306a\u308a\u307e\u3059\u3002\u88c5\u7f6e\u3092\u719f\u77e5\u3057\u305f
\n\u30e1\u30fc\u30ab\u30fc\u30b9\u30bf\u30c3\u30d5\u306b\u304a\u8a71\u304c\u3046\u304b\u304c\u3048\u3001\u5b9f\u6a5f\u6307\u5c0e\u3082\u53d7\u3051\u3089\u308c\u307e\u3059\u3002\u666e\u6bb5\u601d\u3063\u3066\u3044\u308b\u7591\u554f\u306a\u3069\u3092\u3054\u8cea\u554f\u3059\u308b\u3053\u3068\u3082
\n\u3067\u304d\u307e\u3059\u306e\u3067\u3001\u3053\u306e\u6a5f\u4f1a\u306b\u3075\u308b\u3063\u3066\u3054\u53c2\u52a0\u304f\u3060\u3055\u3044\u3002
\n\uff08\u5f53\u65e5\u306e\u6d41\u308c\uff09
\n\u30fbCDE (Chemical Dry Etching) \u3068\u306f\uff1f
\n\u30fbCDE-7-4 \u88c5\u7f6e\u6982\u8981
\n\u30fbCDE\u306e\u4e3b\u306a\u30d7\u30ed\u30bb\u30b9\u30fb\u6700\u8fd1\u306e\u7528\u9014
\n\u30fb\u5b9f\u6a5f\u4f7f\u7528\u5b9f\u7fd2
\n\u30fb\u3054\u8cea\u554f\u7b49\u305d\u306e\u4ed6<\/p>\n

\u3010\u958b\u50ac\u65e5\u3011\u3000
\n2018\u5e748\u67086\u65e5\uff08\u6708\uff0913:00-17:00<\/p>\n

\u3010\u4f1a\u5834\u3011
\n\u7dcf\u5408\u7814\u7a76\u68dfB 0022\u5ba4<\/p>\n

\u3010\u5fdc\u52df\u4eba\u6570\u3011
\n10\u540d\u7a0b\u5ea6<\/p>\n

\u3010\u7533\u8fbc\u5148\u30fb\u554f\u5408\u305b\u3011
\n\u6570\u7406\u7269\u8cea\u7cfb\u30d1\u30ef\u30fc\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u5171\u7528\u30b7\u30b9\u30c6\u30e0
\nE-mail\uff1asharing-power-e(at)ml.cc.tsukuba.ac.jp\u2003
\n\u203b(at)\u3092@\u306b\u5909\u63db\u3057\u3066\u9001\u4fe1\u3057\u3066\u304f\u3060\u3055\u3044 \u2003
\n\u203b\u4ef6\u540d\u306b\u3001\u300cCDE-7-4\u64cd\u4f5c\u8b1b\u7fd2\u4f1a\u5fdc\u52df\u300d\u3068\u8a18\u8f09\u3044\u305f\u3060\u304d\u3001\u6240\u5c5e\u6a5f\u95a2\u3001\u90e8\u7f72\uff08\u7814\u7a76\u5ba4\u540d\uff09\u3001\u2f52\u540d\u3001\u8077\u540d\uff08\u5b66\u5e74\uff09\u3001
\n\u3000\u96fb\u8a71\u756a\u53f7\u3001E-mail\u2003\u3092\u3054\u9023\u7d61\u304f\u3060\u3055\u3044\u3002 <\/p>\n

\u3010\u5fdc\u52df\u7de0\u5207\u3011
\n2018\u5e748\u2f491\u2f47(\u6c34)<\/p>\n","protected":false},"excerpt":{"rendered":"

\u4e0b\u8a18\u306e\u30c8\u30ec\u30fc\u30cb\u30f3\u30b0\u306f\u7d42\u4e86\u3044\u305f\u3057\u307e\u3057\u305f\u3002 ————————————&#8212 … \u7d9a\u304d\u3092\u8aad\u3080 →<\/span><\/a><\/p>\n","protected":false},"author":3,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[3,4],"tags":[],"class_list":["post-2664","post","type-post","status-publish","format-standard","hentry","category-info","category-public"],"_links":{"self":[{"href":"https:\/\/openfacility.sec.tsukuba.ac.jp\/public\/wp-json\/wp\/v2\/posts\/2664","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/openfacility.sec.tsukuba.ac.jp\/public\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/openfacility.sec.tsukuba.ac.jp\/public\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/openfacility.sec.tsukuba.ac.jp\/public\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/openfacility.sec.tsukuba.ac.jp\/public\/wp-json\/wp\/v2\/comments?post=2664"}],"version-history":[{"count":7,"href":"https:\/\/openfacility.sec.tsukuba.ac.jp\/public\/wp-json\/wp\/v2\/posts\/2664\/revisions"}],"predecessor-version":[{"id":2892,"href":"https:\/\/openfacility.sec.tsukuba.ac.jp\/public\/wp-json\/wp\/v2\/posts\/2664\/revisions\/2892"}],"wp:attachment":[{"href":"https:\/\/openfacility.sec.tsukuba.ac.jp\/public\/wp-json\/wp\/v2\/media?parent=2664"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/openfacility.sec.tsukuba.ac.jp\/public\/wp-json\/wp\/v2\/categories?post=2664"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/openfacility.sec.tsukuba.ac.jp\/public\/wp-json\/wp\/v2\/tags?post=2664"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}